Edward,
I can supply the 100um wafers but think that processing the 100um
through the Silicon Nitride process might be difficult due the low
thickness of the wafers. I can check with a few of the film houses to
see if they can provide this service on such thin wafers.
One of them is process Specialities.

Contact me off-line via email or phone.

Regards,
Ken Smith

Edward Castellana wrote:
> Hello,
>
> Does anyone know of a company that supplies double side polished wafers,
> ~100 um thick silicon, <100> wafers with silicon nitride on one or both
> sides.  I have had no luck finding one.
>
> Thanks,
>
> Ed Castellana
> Department of Chemistry
> Texas A&M University
> College Station TX  77843
>
> 979-845-7638
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