foo foo,
        A possible reason is poor adhesion at the edges of the etch line caused
by water molecules retained on the Gold surface. We had similar rough edges to
every thing we etched in the silicon world had a ragged edge whether we used wet
or plasma etch.  When we started vacuum vapor priming we created a water free
surface for the resist to adhere to and we got straight etch lines.  I do not
know of any one using HMDS vacuum priming on Gold but there are specific
adhesion promoters for Gold that work in vacuum vapor primers.  Let me know if I
can be of any help.  Bill Moffat

-----Original Message-----
From: foo foo [mailto:[email protected]]
Sent: Tuesday, December 03, 2002 6:48 AM
To: [email protected]
Subject: [mems-talk] Rough edges in wet etch






dear all

I am etching a thin gold layer about 10-30nm thick with a wet etch, KI. I am
using PMMA polymer as an etch mask. My problem is that I get very rough
edges, by that I mean uneven edges, on the metal after the etching. Does
anyone have any ideas why this happens.

Regards
Patrick

_________________________________________________________________
Hela veckans väder  http://www.msn.se/vader


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