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MEMSnet Home: MEMS-Talk: how to bond silicon nitride to glass.
how to bond silicon nitride to glass.
2002-12-06
Andrew Liang
how to bond silicon nitride to glass.
Andrew Liang
2002-12-06
Dear experts,

I would like to know how to bond silicon nitride(actually it is a silicon
wafer with nitride layer on top) to a glass wafer? Thanks.

Andrew


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