I am looking to have about 50 wafers (4 inch) coated with 1.1um +/- .1 um
of LPCVD SiN. From the literature, this seems possible if a silicon rich
SiN is used to reduce internal stress. If anyone knows of a vendor that
can do this, I would appreciate the information.
Thanks,
--
Dr. Kevin M. Walsh
Electrical Engineering Department, Speed Scientific School
University of Louisville, Louisville, KY 40292
(502) 852-0826
Internet address: [email protected]
