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MEMSnet Home: MEMS-Talk: Si3N4 to glass
Si3N4 to glass
2002-12-08
Enzhu Liang
2002-12-09
Imran Ghauri
Si3N4 to glass
Enzhu Liang
2002-12-08
Hi there,

I have one more question: How to bond silicon nitride ( a silicon wafer with
silicon nitride layer on top) to a glass wafer? Thanks.

Best regards,

       Enzhu Liang





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