Rick,
     Vapor priming gold works it just needs either a specialized silane, the
mercaptosilanes are a common use and or a longer time.  For example for bets
adhesion of Aluminum it takes about 4 times as long with HMDS that oxide takes.
Bill Moffat

-----Original Message-----
From: Richard Morrison [mailto:[email protected]]
Sent: Monday, December 09, 2002 5:23 AM
To: [email protected]
Subject: [mems-talk] rough gold edges


The rough edges are caused by the etch getting underneath the resist mask, I
use a thin layer of TiW on top of the Gold for good adhesion, you first etch
the TiW with 100% hydrogen Peroxide, takes around 3 minutes for 300 A of
TiW, after gold etch strip the resist and then remove the TiW with H2O2. I
tried to vapor prime the Gold but it does not work has well as TiW.

Rick Morrison


Rick Morrison
Sr. Semiconductor Engineer
Radant Mems Inc.
255 Hudson Road
Stow Ma, 01775
Tel- 978-562-3866
Cell 508-801-4796
AMS Phone: 508-770-3521
EMAIL  [email protected]


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