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MEMSnet Home: MEMS-Talk: Dry etching of Si Using SiN as an etch mask
Dry etching of Si Using SiN as an etch mask
2002-12-11
Marc A F van den Boogaart
Dry etching of Si Using SiN as an etch mask
Marc A F van den Boogaart
2002-12-11
Dear colleagues,

Does anybody have a dry-etch recipe that can etch Si with an SiN hard mask?
What is the selectivity with this recipe?

Thanks,

Marc

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