SU-8 once it has been hard baked should withstand both KOH and TMAH at
that temperature. I am not sure whether the SU-8 will discolor however.
You may consider a longer hardbake than Microchem suggests.

Jennifer Pagan
Senior Process Engineer
WaveguideSolutions, Inc.
[email protected]
Phone: 704-927-0408
Fax: 704-599-3536


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On
Behalf Of aslam muhammad
Sent: Thursday, December 12, 2002 6:34 AM
To: [email protected]
Subject: [mems-talk] SU 8 PHOTORESIST

Hi all

  it will be a great favour if anybody let me know
whether SU 8 photoresist withstands in KOH OR TMAH (
at 90 degree celcius).

thanks in anticipation


M.Aslam

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