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MEMSnet Home: MEMS-Talk: Etching Si with SiO2 as mask
Etching Si with SiO2 as mask
2002-11-25
Knighton, Ed
2002-11-27
Beverley Eyre
2002-11-27
Beverley Eyre
2002-12-02
Robert C Cole
2002-11-25
Patrick Carlberg
2002-11-25
Hsu-Wei Fang
2002-11-25
Robert Dean
2002-11-25
Hongjun Zeng
2002-11-25
foo foo
2002-11-26
Burkhard Volland
Etching Si with SiO2 as mask
foo foo
2002-11-25



Dear all

I am interested in etching Si with SiO2 as an etch mask. Does anyone know of
a good wet or dry process?

All sugestions are highly apricitated

Patrick

_________________________________________________________________
Planera semestern på MSN http://www.msn.se/resor/default.asp


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