RIE with SF6 etches si much faster that it etches SiO2.

Good luck,

Hongjun Zeng, Ph.D
Microfabrication Applications Laboratory (MAL)
University of Illinois at Chicago
ERF Building, 842 W. Taylor Street
Chicago, IL 60607-7022
Room 3014 ERF
Tel.: 312-413-5889, Fax: 312-996-6465

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Patrick Carlberg
Sent: Monday, November 25, 2002 8:48 AM
To: [email protected]
Subject: [mems-talk] Etching Si with SiO2 as mask


Dear all

I am interesseted in etching Si with SiO2 as an etch mask. Does anyone
know of a dry or wet etch that can be used?

All comments are highly apriciated

Patrick





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