Mixing one part NH4OH with three parts H2O2 makes an effective TiW etch.


 Anke Stock  wrote:
Hi Liz,
try the following 1 part HCl, 2 parts H2O2, 8 Parts H20,
then heat 30 to 38 °Celsius and stir the solution. W is etched by H2O2 and Ti by
HCL, the solution gets yellow. You can also take more parts of H2O2, and less
water. Good luck!
Anke Stock >
> --__--__--
>
> Message: 5
> Date: Tue, 19 Nov 2002 18:47:24 +0000 (GMT)
> From: "Elizabeth.Conway"
> To: [email protected]
> Subject: [mems-talk] query on wet etch of TiW in H202
> Reply-To: [email protected]
>
> Hi,
> what variables affect TiW etch rate in H202 in addition to temperature and low
> rate. The temperature for H202 is set at 50 deg C. IS there a metallic which
> catalyses TiW etch or some other variables which accelerates the etch rate,
>
> Regards,
> Liz Conway
>


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