Dear Colleagues,

Can anyone tell me where can I find information about Boron diffusion and
activation in polysilicon or silicon. I need the information to study the
effect of RTP on boron activation. Kindly assist me.

Thanks
Chew Soon Aik (SA Chew)
Postgraduate Internship - Device Modeling
Silterra (M) Sdn Bhd
Lot 8, Phase 2, Kulim Hi-Tech Park
09000 Kulim, Kedah, Malaysia
Web: www.silterra.com