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MEMSnet Home: MEMS-Talk: Etching of Si with Tungsten as mask
Etching of Si with Tungsten as mask
2002-12-17
changhong ke
Etching of Si with Tungsten as mask
changhong ke
2002-12-17
Dear all:

I want to etch silicon wafer with Tungsten as mask to make a 1um deep trench. We
don't want undercut happen, so we need to find a anistropic etchant for silicon.
Would anyone can provide me some suggestion about the anistropic etchant in this
case? Your help is greatly appreciated.

Have a nice holiday,


changhong

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