Dear all:

I am looking for an echant which can anisotropic etch Si with Tungsten as mask.

Best Regards,

changhong
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Changhong Ke
Mechanical Engineering
Northwestern University
2145 Sheridan Road
Evanston,IL 60208-3111 USA
Lab Phone:(847)467-7673
Fax:(847)491-3540
E_mail:[email protected]