Patrick,

Check out http://www.evgroup.com/products/wafercleaner.htm

for megasonic / non-contact wafer cleaning.

Best regards,
Helge

-----Original Message-----
From: foo foo [mailto:[email protected]]
Sent: Wednesday, December 18, 2002 4:23 AM
To: [email protected]
Subject: [mems-talk] wafer cleaning


Dear all

I have a general question concerning cleaning of Si-wafers. How can one
remove small particles, espescially Si-particles, in a gentle way.

Sincerly
Patrick





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