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MEMSnet Home: MEMS-Talk: wafer cleaning
wafer cleaning
2002-12-18
foo foo
2002-12-18
Mark West
2002-12-18
Luesebrink Helge
3D-CSP
2002-12-19
Andrea Reinhardt
2002-12-18
[email protected]
2002-12-18
[email protected]
wafer cleaning
[email protected]
2002-12-18
Use H2SO4+H2O2 10:1 at 120oC

> Dear all
>
> I have a general question concerning cleaning of
> Si-wafers. How can one  remove small particles,
> espescially Si-particles, in a gentle way.
> Sincerly
> Patrick
>
>
>
>
>
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