Patrick,

  Depending on the size of the particle there are different options out there.
Suss supplies a cleaner for 0.1-1um particle removal which envolves a gentle
flow of megasonicly charged DI water.  For larger particle sizes a slower
frequency would be more desirable.  You can check out our equipment at
www.suss.com.

Regards,
Brian Douglas
[email protected]
Applications Engineer
Suss Microtec Inc.
(802) 244-5181 x-202