Folks,
Can someone provide me with a recipe for making ohmic contacts on n type
Si
with Au as the top layer. I know that this should be a rather straight
forward and well documented procedure but we have had lots of trouble
getting good contacts.
Thanks,
Milan
Dr. Milan Buncick
Director, MEMS/Photonics
The AEgis Technologies Group Inc.
631 Discovery Drive
Huntsville, AL 35806
(256) 876-7457
(256) 842-2507 Fax
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