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MEMSnet Home: MEMS-Talk: SiC in HF
SiC in HF
1997-05-20
Carl Sullivan
SiC in HF
Carl Sullivan
1997-05-20
Hello,
Can anyone tell me if  concentrated HF or buffered HF will attack SiC, and Ta?
If so does anyone know the specific etch rates at room temp, and how increases
in temp effect the etch rate?
Thanks,
Carl Sullivan


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