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MEMSnet Home: MEMS-Talk: How to fabricate W and Mo
How to fabricate W and Mo
2002-12-26
Lee Tae-Won
2002-12-26
Mighty Platypus
2003-01-06
[email protected]
How to fabricate W and Mo
Lee Tae-Won
2002-12-26
Dear colleagues.

I'm trying to etch sputtered Mo and W after photo-lithography.

Could you please let me know which wet&dry etchants are effective for these
materials.

furthermore  , Adhesion ability with Au(gold) is good in these materials?

Thank you for your help , in advance.


PS .  Recommendation  of related references and papers would be appreciated.

E-mail : [email protected]

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