I would appreciate if somebody can supply me any information and/or
related references about the attacking rate of hydrofluoric acid on heavily
phosphorus doped LPCVD polysilicon. We are testing the changes of the
mechanical properties of this material, which is from MUMPs 11, due to
the exposure time to HF. Thanks a lot.

Bin Yuan
Dept. of Mechanical Engineering
Johns Hopkins University
Baltimore, MD 21211