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MEMSnet Home: MEMS-Talk: Minimun available thiickness of sputtered metal films.
Minimun available thiickness of sputtered metal films.
2002-12-30
Lee Tae-Won
Minimun available thiickness of sputtered metal films.
Lee Tae-Won
2002-12-30
Sputtered W and Mo  can meet constant 100~200A film thickness in whole substrate
area ?

i'm worry about bad coverage on substrate due to very thin thickness.

If impossible , how about using electoplating process?

Happy New Year...
TW Lee.

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