Has anyone experience with making stable PECVD-nitride membranes?

Kind regards,

Johan.
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           ir.ing. Johan E. van der Linden

            University of Gent (Belgium)
  Department of Information Technology (INTEC)
    St-Pietersnieuwstraat 41    B-9000 Gent
   Tel + 32 9 264 33 16 Fax + 32 9 264 35 93

   e-mail: [email protected]
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