> Sputtered W and Mo  can meet constant 100~200A film thickness in whole
substrate area ?
> i'm worry about bad coverage on substrate due to very thin thickness.

Well, this will of course depend on your substrate, i.e. surface roughness,
temperature, and wetting angle of your material on the substrate.

100A of W sputtered onto a cold Titanium wetting layer will be a continuous
film. I have no experience with Mo, but W has a high sticking coefficient
on almost everything, and such a thin film should not run into the usual
adhesion problems due to high film stress...

Happy New Year, in your timezone you should have already made it ;-)

best regards,
klaus
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