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MEMSnet Home: MEMS-Talk: Etching Al2O3
Etching Al2O3
2002-12-30
Sampo Tuukkanen
2003-01-01
[email protected]
2003-01-06
[email protected]
Etching Al2O3
[email protected]
2003-01-01
You can't etch it easily. In a plasma reactor you can etch it with BCL3 but
the etch rate is very slow. I don't know of a liquid etchant that works
either. Bob Henderson

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