Hi!

Does anyone have experiences with PDMS and Si wafer bonding?I have tried
different expriments for several times with different glues, such as
photoresist, expoxy, but bad results:(.

The following is the conditions:

1. ~100um thick of PDMS film
2. 1X1 cm^2 of Silicon wafer (500um thick)

The surface of Silicon film which should be bonded with wafer is not clean due
to the peer-off process. I hope someone can provide me with the glue
information. So I can use to bond both film and wafer together tightly.
I wish it has >80% bonding possibility.


Thank you for your attention and any advice will be appreciated.

Jack C. Chen

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