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MEMSnet Home: MEMS-Talk: half metal film deposition close to bulk resistivity
half metal film deposition close to bulk resistivity
2003-01-09
YAMAGISHI Yutaka (horiba/jp)
half metal film deposition close to bulk resistivity
YAMAGISHI Yutaka (horiba/jp)
2003-01-09
Hi everyone,

I am looking for the method or important parameter to fabricate half metal thin
film such as Bi,Te,Sb. using vacuum deposition
onto a SiN and SiO2 coated silicon.  I tried to deposit Sb and Bi from a
resistive heating boat under room temperature by deposition rate over 10nm/s.
However resistivity of my films are lower than bulk value. Does anyone know how?

Y.Yamagishi
HORIBA, Ltd.
Kyoto, Japan

E-mail: [email protected]



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