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Copper CMP
2003-01-09
josh wo
2003-01-09
bille@npphotonics (Bill Eaton)
Copper CMP
josh wo
2003-01-09
Dear Experts,
I am trying to develop a Copper CMP process using thoe PM5 polisher that made by
Logitech. Unfortunately I can't get any infor from them because I bought a used
machine from else where. So, I was hoping if any one can point me to the right
direction ......things like where to get the slurries or chemicals ......

Thank you very much
Josh
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