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MEMSnet Home: MEMS-Talk: Anyone know a good nickel etch?
Anyone know a good nickel etch?
2003-01-09
Carl Arft
2003-01-10
David Nemeth
2003-01-10
Hanqing Li
2003-01-10
Roger Shile
2003-01-13
???
Anyone know a good nickel etch?
Hanqing Li
2003-01-10
Yes, Thanks,

Hanqing

At 08:59 AM 1/10/03 -0500, you wrote:
>Transene makes an etch called TFB for nickel
>
>David Nemeth
>Senior Process Engineer
>Sophia Wireless, Inc.
>14225-C Sullyfield Circle
>Chantilly, VA
>Ph: (703) 961-9573 x206
>Fax:(703) 961-9576
>
>-----Original Message-----
>From: [email protected]
>[mailto:[email protected]]On Behalf Of Carl Arft
>Sent: Thursday, January 09, 2003 2:42 PM
>To: [email protected]
>Subject: [mems-talk] Anyone know a good nickel etch?
>
>
>I'm trying to pattern nickel with photoresist.  Aqua regia seems to etch
>too quickly, and leaves some nickel un-etched.  Anyone have any other etch
>chemistries?
>
>thanks
>
>please respond to:  [email protected]
>
>
>
>********************************************
>Carl Arft
>Dept. of Electrical and Computer Engineering
>University of California, Davis
>Email: [email protected]
>Phone: (530) 754-9249
>********************************************
>
>
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===========================================
Hanqing Li, Ph.D.
Research Scientist
Massachusetts Institute of Technology
Microsystems Technology Laboratories
Phone: (617)-258-5920,  Fax (617)-258-5940
===========================================


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