How about 3:1:1(H2SO4:H2O2:H20) at 45??
I spend 15" on my nickel mask etching(6000 angstrom)
----- Original Message -----
From: "Carl Arft" 
To: 
Sent: Friday, January 10, 2003 3:41 AM
Subject: [mems-talk] Anyone know a good nickel etch?


> I'm trying to pattern nickel with photoresist.  Aqua regia seems to etch
> too quickly, and leaves some nickel un-etched.  Anyone have any other etch
> chemistries?
>
> thanks
>
> please respond to:  [email protected]
>
>
>
> ********************************************
> Carl Arft
> Dept. of Electrical and Computer Engineering
> University of California, Davis
> Email: [email protected]
> Phone: (530) 754-9249
> ********************************************
>
>
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