Transene makes several copper etchants.
According to their MSDS, their Copper Etchant 200 is
30% FeCl3 and 3-4% HCl, in H2O.

> -----Original Message-----
> From: [email protected] [mailto:[email protected]]
> Sent: Friday, January 10, 2003 9:06 AM
> To: [email protected]
> Subject: [mems-talk] Copper film etching solution
>
>
> Hi there
> I want to use FeCl3 solution to etch copper film with
> thickness 200nm. Does
> sombody know what is the concentration of FeCl3, or any other
> good etching
> solution for copper film. Thank you.
>
>
>
>
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