Dear all,
i want to structure tungsten dry with PR as masking layer.
Does anybody have experiences on etchrates, selectivities
to SiO2. I thought about CH4, SF6 or Ar as gases.
Regards,
Stefan Junge
--
Institute for Microsensors, -actuators and -systems (IMSAS)
University of Bremen
Stefan Junge (Ph.D student)
Dep. 1: Physics/Electrical Engineering
Otto-Hahn-Allee
28359 Bremen, Germany
P.O. Box 330 440
28334 Bremen, Germany
Tel.: +49-421-218-3586
Fax.: +49-421-218-4774
E-Mail: [email protected]
Internet: www.imsas.uni-bremen.de
