The University of Illinois currently has a surplus LPCVD equipment.
It is a four stack system for SiN, Poly Si and PSG.  Anyone interested
please contact the following address.

Chang Liu, Assistant Professor.
Electrical and Computer Engineering Department      phone:       217-333-4051
Mechanical and Industrial Engineering Department      fax:       217-244-6375
University of Illinois at Urbana-Champaign          email:  [email protected]