I'm from Brasil working as a researcher in a university interested in build
a infra-structure for MEMS and CI design and prototyping and manufacture in
very low volume. Actually, Brasil doesn't have this infra-structure.
It isn´t our intent manufacture CI (- memory, microprocessor....) or MEMS
(airbag sensor, MEMS for inkjet,...). It is our intent focus on specialized
market, like biotech for example.
We are initially planning to build a infra-estructure with 500m2 of
cleanroom classes 10 and 100.
I´m looking for information about equipments to constitute this kind of
infra-structure, for this moment just a idea, (I understand that this is a
difficulty task):
What are these essential equipments?, and costs of this equipments
(approximate)?
Can I use, depending of the mems, the same equipment for mems and CI
prototyping?
Further....
Beyond the cleanroom....what kind of laboratories (and equipment related)
is necessary ?
I was wondering if you could help me?
Thank you very very much
Cesare Quinteiro Pica, MSc
Universidade Federal de Santa Catarina
Florianópolis, Santa Catarina, Brasil