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MEMSnet Home: MEMS-Talk: Thermal and Electrical Properties for High-K materials
Thermal and Electrical Properties for High-K materials
2003-01-20
trammi
Thermal and Electrical Properties for High-K materials
trammi
2003-01-20
Dear all,


                Can anyone give the values of Thermal and Electrical properties
for high-K dielectric materials? I require information mostly about SiO2, Si3N4,
Ta2O5, ZrO2, TiO2, HfO2 etc.,


Thanks in advance,


Yours,


Raman.
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