Dear Greg,

Nice question, and a trivial guess : Maybe Apiezon T or Apiezon H
(www.apiezon.com) grease can be applied.  Good thermal conductivity,
mid-temperature range, vacuum compatible & sticky I guess!  May be removed
with a solvent but I don't have any experience in that.

The only problem is : How to apply on Si wafer ?

Regards,

Oray Orkun Cellek
[email protected]
Research Assistant, Ph. D. Student
Electrical & Electronics Engineering Department
Middle East Technical University
06531 Ankara
Turkey
Tel : +90 312 210 4579
Fax : +90 312 210 1261


----- Original Message -----
From: "Greg Miller" 
To: "General MEMS discussion" 
Sent: Thursday, January 23, 2003 4:02 PM
Subject: [mems-talk] thermal conductive glue


> Mems Group,
>
> I'm looking for a good thermal conductive glue that will bond two silicon
wafers together - and be release after a few operation that require good
thermal conductivity, vacuum compatible, temperature range between -20 to
125 C.
>
> Thanks,
>
> Greg Miller
> KVH Industries
> Email: [email protected]
>
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