A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: thermal conductive glue
thermal conductive glue
2003-01-23
Greg Miller
2003-01-23
Oray Orkun Cellek
2003-01-23
Bill Moffat
2003-01-23
[email protected]
2003-01-24
Alik Widge
2003-01-24
Blunier, Stefan
2003-01-23
Michael Yakimov
2003-01-24
BERAUER,FRANK (HP-Singapore,ex7)
2003-01-27
Wilson Xia
thermal conductive glue
BERAUER,FRANK (HP-Singapore,ex7)
2003-01-24
Hi Greg,

We have used normal photoresist for that purpose. It's not a
good thermal conductor, but a thin layer (make it less that
1um) is not a big barrier for heat flow either. We haven't
done any calculations, but I would suspect the temperature
drop across it would be less than across the wafer thickness.
Removal is very easy in Acetone (slightly heated if necessary).
Of course this works only if you stay below the temperature
where resist degrades thermally (125 deg C is fine).

Greetings,
        Frank Berauer
        Senior R&D Engineer
        Hewlett-Packard Singapore


-----Original Message-----
From: Greg Miller [mailto:[email protected]]
Sent: Thursday, January 23, 2003 10:03 PM
To: General MEMS discussion
Subject: [mems-talk] thermal conductive glue


Mems Group,

I'm looking for a good thermal conductive glue that will bond two silicon
wafers together - and be release after a few operation that require good
thermal conductivity, vacuum compatible, temperature range between -20 to
125 C.

Thanks,

Greg Miller
KVH Industries
Email: [email protected]

_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
Addison Engineering
MEMStaff Inc.
MEMS Technology Review