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MEMSnet Home: MEMS-Talk: Can parylene resist the attack of KOH andTMAH?
Can parylene resist the attack of KOH andTMAH?
2002-11-28
Gang Li
2002-11-29
Mighty Platypus
2002-11-30
Matthieu Liger
2002-12-02
Matthieu Liger
Can parylene resist the attack of KOH andTMAH?
Gang Li
2002-11-28
Dear all,

Can parylene be used to protect frontside of the wafers when
you carry on etching trough the wafers from the backside?
Any information will be appreciated greatly.

Regards,

Li Gang

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