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MEMSnet Home: MEMS-Talk: Very thick PECVD Oxide
Very thick PECVD Oxide
2002-11-29
A.K.Ismail
Very thick PECVD Oxide
A.K.Ismail
2002-11-29
Hello,

Does anyone have experienced of depositing very thick PECVD silicon dioxide (6
micron approx.)on Si substrate?. The oxide should be homogen and in good
quality which then will be bonded to another Si.  We have STS PECVD system
which normally can deposit up to 2-3 micron.
Any suggestion would be appreciated.

Thanks,
Khamim


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