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MEMSnet Home: MEMS-Talk: Polysilicon Etching
Polysilicon Etching
2003-01-27
abhay
2003-01-27
David Springer
2003-01-27
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Polysilicon Etching
abhay
2003-01-27
hi all,
  We are looking for etching a 4000 A polysilicon
layer. We want the etching do be completed in less
then 2min as there after our photoresist tend to etch
away. So what solution shd we try and what proportion.
         Thanks

Regards
Abhay Porwal

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