major supplies are MDC (www.mdcvacuum.com), Kurt Lesker (www.lesker.com) ,
Varian technologies( www.varianinc.com )
there are several major types, depending on the vacuum requirements,
temperatures and load on the feedthrough
Cheepest are sealed with elastomer (viton) seal (<120C, >1e-8 torr) - the
cheapest ones, then all-metall bellows (200C, 1e-11 torr), magnecally
coupled feedthroughs (> 200C with magnet removed ,1e-11) (all the numbers
are from the top of my head, not really accurate)
ferrofluidic ones are desined for constant load, and are rather expensive. I
don't think you need anything that good for just a shutter.. cheapest one
will do the job
Mike

> -----Original Message-----
> From: Thomas B. Jones [SMTP:[email protected]]
> Sent: Friday, January 24, 2003 08:24
> To:   MEMS listserve
> Subject:      [mems-talk] rotary mechanical feedthrus
>
> Can anyone tell me if there are good rotary mechanical feedthrus available
> that are suitable for vacuum evaporation stations?  We are considering a
> shutter system for multiple metallization and think the most flexible
> arrangement for our particular setup might be to mount the shutter inside
> on shaft of the feedthru, and  then turn it back and forth manually.
>
> I believe there are (or were) some components made by Ferrofluidics in the
> Boston area, but wonder if they are the cheapest and most appropriate for
> our type of vacuum system.   Thanks in advance for any suggestions.
>
> T. B. Jones
>
>
> ________________________________________________________
> Thomas B. Jones
> Professor of Electrical Engineering
> University of Rochester
> P.O. Box 270126
> Rochester, NY  14627-0126    (USA)
> phone: 1-585-275-5233   fax: 1-585-273-4919
> email: [email protected]
> http://www.ece.rochester.edu/~jones
> ________________________________________________________
>
>
>
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