Hi, I am doing TiO2 sol-gel spin-coating process.
The sol that I got from the precursor Ti(OC3H7)4
looks clear and I use ethanol as the solvent.
However, after spinning on the spin station usually
used in the cleanroom, I found there are very thin
streaks emanating from the center of the wafer and
they are very uniformly distributed on the entire
surface of the wafer. I changed the solvent to IPA
assuming it evaporates slower than ethanol. The
situation doesn't change.

I am wondering if it is because of the spinning
process or still due to some problems with the sol.

Thanks very much for any suggestions!

Yuan

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