Hi Xiaoshan,

We offer planarization materials and other functional materials for MEMS
applications.  Our web site to our product information is

 www.brewerscience.com/smproducts/sm_mems_perf.html

I hope this helps,
Regards,
Shane


Xiaoshan Zhu wrote:

> Hi, there,
>
> I am looking for some materials which can be spin-coated on wafer surface
> and form the planarization layer. However, I don't want its thickness go up
> to 200nm. In addition, there is no pinholes and no cracks.
>
> Thank you so much!
>
> Xiaoshan
>
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