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MEMSnet Home: MEMS-Talk: Looking for any hard-baked PR for mutiple layer processing.
Re: Bonding of Silicone Rubber
2003-01-27
Nikola Pekas
Looking for any hard-baked PR for mutiple layer processing.
2003-01-28
Park, Sang Won (Daniel)
Looking for any hard-baked PR for mutiple layer processing.
Park, Sang Won (Daniel)
2003-01-28
Hi, all.
I am trying to do a double layer process. I usually use S1813 PR for the
first layer after hardbaking it @95 C for 10 minutes. Then I use thick SU-8
negative PR or SJR5740 PR for the second layer. But when I did the second
layer, the first layer made wrinkle and/or crack problems.
I'd like to get any information for any PR for the first layer which can
withstand the subsequent processing such as multiple layer processing.
Best regards.

Daniel Sang-Won Park
Graduate Research Assistant at UT-Dallas
Best regards.



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