Yuan,

With that particular sol-gel precursor - I'm not sure changing the solvent
will help very much.

As always with sol-gel - it helps to have a moisture free environment during
processing.  I've seen many a grad student attempt to achieve this with
crude ways and it never works.  For a low budget - use a benchtop spin
coater in a glove bag or glovebox.  Brinker's voluminous text on sol-gel
goes over a number of other guidelines.

- David

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of X. Yuan
Sent: Saturday, January 25, 2003 1:11 PM
To: [email protected]
Subject: [mems-talk] titania sol-gel spin-coating issue


Hi, I am doing TiO2 sol-gel spin-coating process.
The sol that I got from the precursor Ti(OC3H7)4
looks clear and I use ethanol as the solvent.
However, after spinning on the spin station usually
used in the cleanroom, I found there are very thin
streaks emanating from the center of the wafer and
they are very uniformly distributed on the entire
surface of the wafer. I changed the solvent to IPA
assuming it evaporates slower than ethanol. The
situation doesn't change.

I am wondering if it is because of the spinning
process or still due to some problems with the sol.

Thanks very much for any suggestions!

Yuan

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