I think the temperature 650 or time  is higher for Ti/Pt/SiO2 because the metal
phase and sio2 has changed another phase.
you must find the phase figure for them and find the phase changed point .
I can test 300degree and 10min.

----- Original Message -----
From: "jiaz" 
To: 
Sent: Saturday, January 11, 2003 12:19 AM
Subject: [mems-talk] Pin holes in Pt


> Hi, there.
>
> In our experiments, on the surface of the sputtered Ti/Pt(on top of
> SiO2), many pin holes came out after the annealing for the metals at
> 650C, 30min. Who can kindly tell me the reasons and the solution will be
> really appereciated.
>
> Looking forward to your help.
>
> ********************************************************************
> Zhou, Jia
> Center of Microtechnologies, Chemnitz University of Technology
> Reichenhainer Street 88, RM. M211
> D-09126, Chemnitz, Germany
> ********************************************************************
>
>