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MEMSnet Home: MEMS-Talk: characteristics of unsilicized poly-Si
characteristics of unsilicized poly-Si
1997-01-20
Michael S. C. Lu
characteristics of unsilicized poly-Si
Michael S. C. Lu
1997-01-20
I'm looking for the conductivity (electrical and thermal) and thermal
expansion coefficient of the unsilicized polysilicon. Can anyone give
me some suggestions on that?

Thanks,

-Michael Lu

Electrical and Computer Engineering
Carnegie Mellon University


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