SU8 - of course!
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Franck

"-----Original Message-----
"From: Patrik Möller [mailto:[email protected]]
"Sent: Wednesday, 29 January, 2003 00:27
"To: [email protected]
"Subject: [mems-talk] um elastomer structures by UV patterning
"
"
"I´m looking for an elastomer/polymer formulation that can be
"UV-patterned to form microstructures of 5-10um like a
"photoresist by spinning, softbaking, UV-exposing, developing.
"
"A modulus (E) of 3-8MPa would be great.
"
"Strong adhesion to Au/epoxy surfaces, low dielectric constant,
"chemical resistance and transparncy are desired properties.
"
"Do anyone know of such a material and where it can be found?
"
"Regards,
"
"Patrik
"Royal Institute of Technology
"Stockholm
"Sweden
"__
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