Hi all,
Try to use Anodic bonded mask of Si on Pyrex wafer and HF for patterning the
Pyrex.
See papers from KTH Institute (Sweden) : PhD Thesis are avaible on web.
Best Regards

Charles Ellis a écrit :

> Loren,
>
> Have you actually worked with this glass. I have found it to be almost
> impossible to work with, and expensive.  If someone has a lot of
> experience with this glass please let me know, I would like to learn the
> "tricks".
>
> Thanks,
> Charles Ellis
> Auburn University
>
> -----Original Message-----
> From: [email protected]
> [mailto:[email protected]] On Behalf Of St.Clair, Loren
> Sent: Tuesday, January 28, 2003 7:47 AM
> To: 'General MEMS discussion'; '[email protected]'
> Subject: RE: [mems-talk] Photo-definable glass
>
> Sarah,
>
> Foturan from Schott Corporation is a material that can be patterned
> using a
> standard mask aligner (300-320nm) and HF.  Craig Wurzel can be contacted
> at
> [email protected] if you have any questions about prices.
>
> Hope this helps,
>
> Loren St. Clair
>
>  -----Original Message-----
> From:   Sarah Schwab [mailto:[email protected]]
> Sent:   Friday, January 24, 2003 4:38 PM
> To:     '[email protected]'
> Subject:        [mems-talk] Photo-definable glass
>
> Hello there
> I am looking for some information on photo-definable glass.
> Could anyone please help me with the following:
>
> Suppliers?
> Approx cost per wafer 4" diameter - sample quantities?
> Minimum thickness?
>
> Many thanks
> Sarah
>
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>
> _______________________________________________
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Dr. Paolo Bondavalli
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LABCOM - MICROTEC
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