I've had excellent luck with ferrofluidics in the past, but they tend to be
expensive.

A cheaper option, if you don't need a lot of torque, is a magentically
coupled feedthrough. (e.g., http://www.thermionics.com/frmre.htm - but I'm
sure lesker makes them as well.)

If you are doing a lot of rotation, avoid bellows feedthroughs - they tend
to develop leaks or freeze up when used a lot, at least in my experience.

David Nemeth
Senior Process Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
Ph: (703) 961-9573 x206
Fax:(703) 961-9576

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Thomas B. Jones
Sent: Friday, January 24, 2003 8:24 AM
To: MEMS listserve
Subject: [mems-talk] rotary mechanical feedthrus


Can anyone tell me if there are good rotary mechanical feedthrus available
that are suitable for vacuum evaporation stations?  We are considering a
shutter system for multiple metallization and think the most flexible
arrangement for our particular setup might be to mount the shutter inside
on shaft of the feedthru, and  then turn it back and forth manually.

I believe there are (or were) some components made by Ferrofluidics in the
Boston area, but wonder if they are the cheapest and most appropriate for
our type of vacuum system.   Thanks in advance for any suggestions.

T. B. Jones


________________________________________________________
Thomas B. Jones
Professor of Electrical Engineering
University of Rochester
P.O. Box 270126
Rochester, NY  14627-0126    (USA)
phone: 1-585-275-5233   fax: 1-585-273-4919
email: [email protected]
http://www.ece.rochester.edu/~jones
________________________________________________________



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